| Typicality: | 0.325 |
| Saliency: | 0.177 |
| between about 400 sccm | 4 | other |
| between about 250 | 4 | other |
| from the gas source | 2 | location |
| pulse → be provided at → a flow rate | 6 |
| negative | neutral | positive |
| 0.046 | 0.882 | 0.071 |
| Raw frequency | 6 |
| Normalized frequency | 0.177 |
| Modifier score | 0.500 |
| Perplexity | 168.160 |