aspect of
radiation)
→
ReceivesAction
→
controlled
| Typicality: | 0.295 |
| Saliency: | 0.107 |
| carefully | 2 | manner |
| for heating the wafer | 2 | purpose |
| energy → be → controlled | 4 |
| negative | neutral | positive |
| 0.055 | 0.887 | 0.057 |
| Raw frequency | 4 |
| Normalized frequency | 0.107 |
| Modifier score | 0.500 |
| Perplexity | 66.619 |