radiation → CapableOf → project onto resist covered silicon wafer
Typicality: 0.278
Saliency: 0.067
Facets 0
No facets.
Open triples 1
radiation → project onto → resist covered silicon wafer 4
Sentiment analysis
negative neutral positive
0.034 0.867 0.099
Other statistics
Raw frequency 4
Normalized frequency 0.067
Modifier score 0.500
Perplexity 143.255