| Typicality: | 0.504 |
| Saliency: | 0.291 |
| to transfer the wafer | 3 | purpose |
| robot → move on → track | 6 |
| robot → travel on → the track | 4 |
| robot → travel on → track | 4 |
| negative | neutral | positive |
| 0.072 | 0.756 | 0.172 |
| Raw frequency | 14 |
| Normalized frequency | 0.291 |
| Modifier score | 0.900 |
| Perplexity | 187.830 |