| Typicality: | 0.411 |
| Saliency: | 0.377 |
| to the first conveyor structure | 10 | transitive-object |
| to a lock chamber | 6 | transitive-object |
| from the mount table | 6 | location |
| robot → transfer → wafer | 12 |
| robot → transfer → the wafer | 6 |
| robot → be configured to transfer → wafer | 4 |
| negative | neutral | positive |
| 0.064 | 0.873 | 0.062 |
| Raw frequency | 22 |
| Normalized frequency | 0.377 |
| Modifier score | 0.500 |
| Perplexity | 277.689 |