separation → ReceivesAction → performed by wet etching
Typicality: 0.250
Saliency: 0.000
Facets 1
by removing a silicon oxide layer 2 manner
Open triples 1
separation → be performed by → wet etching 3
Sentiment analysis
negative neutral positive
0.055 0.903 0.043
Other statistics
Raw frequency 3
Normalized frequency 0.000
Modifier score 0.500
Perplexity 407.297