silicon HasA precursor
Typicality: 0.465
Saliency: 0.504

Facets 1
together to the process chamber 3 transitive-object
Open triples 1
silicon → contain → precursor 21
Sentiment analysis
negative neutral positive
0.070 0.885 0.044
Other statistics
Raw frequency 21
Normalized frequency 0.504
Modifier score 0.500
Perplexity 345.130