silicon → ReceivesAction → bombarded by ionic energy
Typicality: 0.281
Saliency: 0.074
Facets 1
during the etching steps 4 temporal
Open triples 1
silicon → be bombarded by → ionic energy 4
Sentiment analysis
negative neutral positive
0.055 0.909 0.035
Other statistics
Raw frequency 4
Normalized frequency 0.074
Modifier score 0.500
Perplexity 100.670