| Typicality: | 0.447 |
| Saliency: | 0.462 |
| in this embodiment | 8 | temporal |
| below the first microelectronic element | 3 | location |
| structure → comprise → substrate | 28 |
| structure → include → substrate | 18 |
| structure → have → substrate | 6 |
| structure → comprise → the substrate | 4 |
| structure → be composed of → the substrate | 4 |
| structure → contain → substrate | 3 |
| negative | neutral | positive |
| 0.042 | 0.891 | 0.067 |
| Raw frequency | 63 |
| Normalized frequency | 0.462 |
| Modifier score | 0.500 |
| Perplexity | 426.663 |