| in order to generate an optical image | 3 | purpose |
| by scanning tunneling microscopy | 3 | manner |
| during wafer processing | 2 | temporal |
| surface → be → observed | 23 |
| surface → be → detected | 6 |
| negative | neutral | positive |
| 0.100 | 0.810 | 0.090 |
| Raw frequency | 29 |
| Normalized frequency | 0.336 |
| Modifier score | 0.500 |
| Perplexity | 65.309 |