| Typicality: | 0.542 |
| Saliency: | 0.380 |
| preferably | 6 | degree |
| globally | 2 | degree |
| by polishing using an alkaline slurry | 2 | manner |
| surface → be → planarized | 39 |
| negative | neutral | positive |
| 0.040 | 0.824 | 0.135 |
| Raw frequency | 39 |
| Normalized frequency | 0.380 |
| Modifier score | 0.900 |
| Perplexity | 240.532 |