| further | 11 | degree |
| respectively | 3 | manner |
| for supplying a polishing slurry | 3 | purpose |
| surface → be → provided | 61 |
| surface → be → supplied | 4 |
| negative | neutral | positive |
| 0.035 | 0.869 | 0.096 |
| Raw frequency | 65 |
| Normalized frequency | 0.455 |
| Modifier score | 1.000 |
| Perplexity | 445.243 |