| from each other | 9 | other |
| completely | 3 | degree |
| from the wafer | 2 | other |
| surface → be → separated | 30 |
| surface → be separated in → depth | 3 |
| negative | neutral | positive |
| 0.159 | 0.784 | 0.057 |
| Raw frequency | 33 |
| Normalized frequency | 0.355 |
| Modifier score | 0.500 |
| Perplexity | 407.430 |