Typicality: | 0.250 |
Saliency: | 0.000 |
during photoresist exposure | 3 | temporal |
thickness → minimize → optical reflectivity | 3 |
negative | neutral | positive |
0.044 | 0.884 | 0.073 |
Raw frequency | 3 |
Normalized frequency | 0.000 |
Modifier score | 0.500 |
Perplexity | 387.520 |