thickness CapableOf minimize optical reflectivity
Typicality: 0.250
Saliency: 0.000

Facets 1
during photoresist exposure 3 temporal
Open triples 1
thickness → minimize → optical reflectivity 3
Sentiment analysis
negative neutral positive
0.044 0.884 0.073
Other statistics
Raw frequency 3
Normalized frequency 0.000
Modifier score 0.500
Perplexity 387.520