typically | 3 | degree |
for transferring patterns | 2 | purpose |
from 10 nm to 30 nm | 2 | other |
thickness → be → employed | 28 |
thickness → be → utilized | 4 |
thickness → be → effective | 3 |
negative | neutral | positive |
0.071 | 0.821 | 0.108 |
Raw frequency | 35 |
Normalized frequency | 0.603 |
Modifier score | 0.900 |
Perplexity | 38.079 |