| Typicality: | 0.322 |
| Saliency: | 0.170 |
| substantially | 3 | degree |
| thickness → be formed on → the substrate | 3 |
| thickness → correspond to → a thickness of the substrate | 3 |
| negative | neutral | positive |
| 0.046 | 0.911 | 0.043 |
| Raw frequency | 6 |
| Normalized frequency | 0.170 |
| Modifier score | 0.500 |
| Perplexity | 53.129 |