| Typicality: | 0.369 |
| Saliency: | 0.279 |
| completely | 2 | degree |
| trench → be filled with → a dielectric material | 6 |
| trench → be lined with → a dielectric material | 4 |
| negative | neutral | positive |
| 0.079 | 0.869 | 0.052 |
| Raw frequency | 10 |
| Normalized frequency | 0.279 |
| Modifier score | 0.500 |
| Perplexity | 46.893 |