| Typicality: | 0.484 |
| Saliency: | 0.322 |
| to the bottom | 3 | location |
| partially | 2 | degree |
| trench → be filled with → copper | 8 |
| trench → be filled with → copper material | 4 |
| negative | neutral | positive |
| 0.057 | 0.871 | 0.072 |
| Raw frequency | 12 |
| Normalized frequency | 0.322 |
| Modifier score | 0.800 |
| Perplexity | 117.753 |