| Typicality: | 0.369 |
| Saliency: | 0.279 |
| in the illustrated embodiment | 3 | other |
| preferably | 2 | degree |
| after diffusion | 2 | temporal |
| trench → be filled with → material | 4 |
| trench → be filled with → same material | 3 |
| trench → be filled with → metallic material | 3 |
| negative | neutral | positive |
| 0.083 | 0.855 | 0.062 |
| Raw frequency | 10 |
| Normalized frequency | 0.279 |
| Modifier score | 0.500 |
| Perplexity | 143.425 |