| Typicality: | 0.359 |
| Saliency: | 0.255 |
| by chemical vapor deposition of polysilicon | 3 | cause |
| trench → be filled with → polysilicon | 9 |
| negative | neutral | positive |
| 0.068 | 0.879 | 0.054 |
| Raw frequency | 9 |
| Normalized frequency | 0.255 |
| Modifier score | 0.500 |
| Perplexity | 115.769 |