trench → ReceivesAction → formed in insulating film
Typicality: 0.278
Saliency: 0.067
Facets 1
by the single damascene method 2 manner
Open triples 1
trench → be formed in → insulating film 4
Sentiment analysis
negative neutral positive
0.070 0.886 0.044
Other statistics
Raw frequency 4
Normalized frequency 0.067
Modifier score 0.500
Perplexity 154.650