| by expanding the chamber | 7 | manner |
| between tool | 7 | other |
| in order to obtain the required throughput | 4 | purpose |
| vacuum → be → drawn | 48 |
| negative | neutral | positive |
| 0.124 | 0.806 | 0.070 |
| Raw frequency | 48 |
| Normalized frequency | 0.603 |
| Modifier score | 0.000 |
| Perplexity | 368.083 |