| Typicality: | 0.370 |
| Saliency: | 0.281 |
| on the semiconductor substrate main unit | 2 | location |
| wiring → be formed over → insulating film | 5 |
| wiring → be formed on → interlayer insulation film | 3 |
| negative | neutral | positive |
| 0.055 | 0.906 | 0.039 |
| Raw frequency | 8 |
| Normalized frequency | 0.281 |
| Modifier score | 0.500 |
| Perplexity | 179.986 |