| Typicality: | 0.295 |
| Saliency: | 0.107 |
| thereafter | 2 | temporal |
| according to claim | 2 | other |
| recess → be filled with → a dielectric material | 5 |
| negative | neutral | positive |
| 0.055 | 0.900 | 0.045 |
| Raw frequency | 5 |
| Normalized frequency | 0.107 |
| Modifier score | 0.500 |
| Perplexity | 68.732 |