| Typicality: | 0.326 |
| Saliency: | 0.178 |
| at the dielectric layer | 4 | location |
| naturally | 3 | manner |
| recess → be formed in → the substrate | 4 |
| recess → be formed → a of the substrate | 3 |
| negative | neutral | positive |
| 0.058 | 0.875 | 0.067 |
| Raw frequency | 7 |
| Normalized frequency | 0.178 |
| Modifier score | 0.500 |
| Perplexity | 286.353 |